Xusheng Zhang

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Simulation method of CMP process
- Patent number 10,083,266
- Issue date Sep 25, 2018
- Shanghai Huali Microelectronics Corporation
- Yun Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for forming shallow trenches of the dual active regions
- Patent number 9,871,064
- Issue date Jan 16, 2018
- Shanghai Huali Microelectronics Corporation
- Quan Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for establishing mapping relation in STI etch and controllin...
- Patent number 9,666,472
- Issue date May 30, 2017
- Shanghai Huali Microelectronics Corporation
- Jin Xu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SIMULATION METHOD OF CMP PROCESS
- Publication number 20180032648
- Publication date Feb 1, 2018
- Yun Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FORMING SHALLOW TRENCHES OF THE DUAL ACTIVE REGIONS
- Publication number 20180033810
- Publication date Feb 1, 2018
- SHANGHAI HUALI MICROELECTRONICS CORPORATION
- Quan Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTABLISHING MAPPING RELATION IN STI ETCH AND CONTROLLIN...
- Publication number 20170025304
- Publication date Jan 26, 2017
- Jin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD INTEGRATING TARGET OPTIMIZATION AND OPTICAL PROXIMITY CORREC...
- Publication number 20160291458
- Publication date Oct 6, 2016
- Daquan He
- G06 - COMPUTING CALCULATING COUNTING