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Y. Long He
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Campbell, CA, US
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last 30 patents
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Patent Grant
Plasma etching uniformity control
Patent number
6,737,358
Issue date
May 18, 2004
Intel Corporation
Y. Long He
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma etching uniformity control
Publication number
20040099376
Publication date
May 27, 2004
Intel Corporation, a Delaware corporation
Y. Long He
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma etching uniformity control
Publication number
20030153194
Publication date
Aug 14, 2003
Y. Long He
H01 - BASIC ELECTRIC ELEMENTS