Ya-Ming Chen

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Technologies for high aspect ratio carbon etching with inserted cha...
- Patent number 12,040,176
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for highly anisotropic etching of titanium oxide spacer usin...
- Patent number 12,009,211
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
NON-PLANAR TRANSISTOR STRUCTURES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240405022
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Eric Chih-Fang LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Deposition of Passivating Layer During Spacer Etching
- Publication number 20240258108
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses
- Publication number 20230411116
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SYSTEMS AND PROCESSES WITH PULSED MAGNETIC FIELD
- Publication number 20230377853
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VAR...
- Publication number 20230377895
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Uniformity Control
- Publication number 20230377849
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Shyam Sridhar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable Hardness Amorphous Carbon Mask
- Publication number 20230343592
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods To Provide Anisotropic Etching Of Metal Hard Masks Using A...
- Publication number 20230343554
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNOLOGIES FOR HIGH ASPECT RATIO CARBON ETCHING WITH INSERTED CHA...
- Publication number 20230326737
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Shihsheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Highly Anisotropic Etching Of Titanium Oxide Spacer Usin...
- Publication number 20230154752
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Ya-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS

Ya-Ming Chen

Person

Patents Grantslast 30 patents

Technologies for high aspect ratio carbon etching with inserted cha...

Method for highly anisotropic etching of titanium oxide spacer usin...

Patents Applicationslast 30 patents

NON-PLANAR TRANSISTOR STRUCTURES AND METHODS OF MANUFACTURING THEREOF

Selective Deposition of Passivating Layer During Spacer Etching

Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses

PLASMA SYSTEMS AND PROCESSES WITH PULSED MAGNETIC FIELD

PLASMA ETCHING USING MULTIPHASE MULTIFREQUENCY POWER PULSES AND VAR...

Method of Uniformity Control

Variable Hardness Amorphous Carbon Mask

Methods To Provide Anisotropic Etching Of Metal Hard Masks Using A...

TECHNOLOGIES FOR HIGH ASPECT RATIO CARBON ETCHING WITH INSERTED CHA...

Method For Highly Anisotropic Etching Of Titanium Oxide Spacer Usin...