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Yaacov Zak
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Meltar, IL
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last 30 patents
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Patent Grant
Focus error correction system and method
Patent number
7,760,928
Issue date
Jul 20, 2010
Applied Materials Israel, Ltd.
Tuvia-Dror Kutscher
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
FOCUS ERROR CORRECTION SYSTEM AND METHOD
Publication number
20080089617
Publication date
Apr 17, 2008
Tuvia-Dror Kutscher
G02 - OPTICS