Yafeng Zhang

Person

  • Hitachinaka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Pattern measuring apparatus

    • Patent number 9,024,272
    • Issue date May 5, 2015
    • Hitachi High-Technologies Corporation
    • Kei Sakai
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents