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Hitachinaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Pattern measuring apparatus
Patent number
9,024,272
Issue date
May 5, 2015
Hitachi High-Technologies Corporation
Kei Sakai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Pattern Measuring Apparatus and Computer Program
Publication number
20120267528
Publication date
Oct 25, 2012
Hitachi High-Technologies Corporation
Kei Sakai
G06 - COMPUTING CALCULATING COUNTING