Yahui HUANG

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Patents Grantslast 30 patents

Information Patent Grant
Control method of radiofrequency source
- Patent number 11,615,942
- Issue date Mar 28, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yahui Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode mechanism and reaction chamber
- Patent number 11,410,833
- Issue date Aug 9, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yahui Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD OF RADIOFREQUENCY SOURCE
- Publication number 20210398776
- Publication date Dec 23, 2021
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yahui HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE MECHANISM AND REACTION CHAMBER
- Publication number 20200321198
- Publication date Oct 8, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yahui HUANG
- H01 - BASIC ELECTRIC ELEMENTS