Yakov Epshteyn

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for chemical mechanical planarization (CMP) and chemical mec...
- Patent number 6,875,087
- Issue date Apr 5, 2005
- Novellus Systems, Inc.
- Marie Mitchel
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for cleaning workpieces
- Patent number 6,818,604
- Issue date Nov 16, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- G11 - INFORMATION STORAGE
Information Patent Grant
Multiple vertical wafer cleaner
- Patent number 6,678,911
- Issue date Jan 20, 2004
- SpeedFam-IPEC Corporation
- Frank Krupa
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning workpieces with uniform relative...
- Patent number 6,502,271
- Issue date Jan 7, 2003
- SpeedFam-IPEC Corporation
- Yakov Epshteyn
- B08 - CLEANING
Information Patent Grant
Method of removing debris from cleaning pads in work piece cleaning...
- Patent number 6,461,441
- Issue date Oct 8, 2002
- SpeedFam-IPEC Corporation
- Yakov Epshteyn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for chemical mechanical planarization (CMP) and chemical mec...
- Publication number 20040229550
- Publication date Nov 18, 2004
- Marie Mitchel
- B08 - CLEANING
Information Patent Application
System and method for cleaning workpieces
- Publication number 20030069150
- Publication date Apr 10, 2003
- Ismail Emesh
- B08 - CLEANING
Information Patent Application
Method and apparatus for semiconductor wafer cleaning
- Publication number 20020166569
- Publication date Nov 14, 2002
- SpeedFam-IPEC Corporation
- Ellis Harvey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple vertical wafer cleaner
- Publication number 20020162181
- Publication date Nov 7, 2002
- SpeedFam-IPEC Corporation
- Frank Krupa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical endpoint detection for buff module on CMP tool
- Publication number 20020155795
- Publication date Oct 24, 2002
- Mark Ferra
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for removing a material layer from a substrate
- Publication number 20020023719
- Publication date Feb 28, 2002
- SpeedFam-IPEC Corporation
- Yakov Epshteyn
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for removing a material layer from a substrate
- Publication number 20010000497
- Publication date Apr 26, 2001
- Yakov Epshteyn
- B24 - GRINDING POLISHING