Yali FU

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Patents Grantslast 30 patents

Information Patent Grant
Method of operating semiconductor manufacturing apparatus and semic...
- Patent number 10,170,285
- Issue date Jan 1, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma treatment and method of operating the apparatus
- Patent number 9,899,194
- Issue date Feb 20, 2018
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMIC...
- Publication number 20180158656
- Publication date Jun 7, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinrong ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS
- Publication number 20170301523
- Publication date Oct 19, 2017
- BEIJING NMC CO., LTD
- Jinrong ZHAO
- H01 - BASIC ELECTRIC ELEMENTS