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Thin film deposition apparatus
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Patent number 5,525,158
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Issue date Jun 11, 1996
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Mitsubishi Denki Kabushiki Kaisha
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Hisashi Tsukazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Evaporation source with a shaped nozzle
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Patent number 4,812,326
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Issue date Mar 14, 1989
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Mitsubishi Denki Kabushiki Kaisha
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Hisashi Tsukazaki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film deposition apparatus
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Patent number 4,811,690
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Issue date Mar 14, 1989
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Mitsubishi Denki Kabushiki Kaisha
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Yasuyuki Kawagoe
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of producing silicon dioxide films
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Patent number 4,624,859
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Issue date Nov 25, 1986
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Mitsubishi Denki Kabushiki Kaisha
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Shuhara Akira
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...