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Yan Du
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for etching high dielectric constant materials
Patent number
7,964,512
Issue date
Jun 21, 2011
Applied Materials, Inc.
Xikun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for etching flash memory gate stacks comprising h...
Patent number
7,780,862
Issue date
Aug 24, 2010
Applied Materials, Inc.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of pattern etching a silicon-containing hard mask
Patent number
7,504,338
Issue date
Mar 17, 2009
Applied Materials, Inc.
Yan Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High selectivity and residue free process for metal on thin dielect...
Patent number
6,933,243
Issue date
Aug 23, 2005
Applied Materials, Inc.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DEVICE AND METHOD FOR ETCHING FLASH MEMORY GATE STACKS COMPRISING H...
Publication number
20080011423
Publication date
Jan 17, 2008
Applied Materials, Inc.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for etching flash memory gate stacks comprising h...
Publication number
20070224813
Publication date
Sep 27, 2007
Applied Materials, Inc.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching high dielectric constant materials
Publication number
20070042601
Publication date
Feb 22, 2007
APPLIED MATERIALS, INC.
Xikun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of pattern etching a silicon-containing hard mask
Publication number
20070010099
Publication date
Jan 11, 2007
APPLIED MATERIALS, INC.
Yan Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching a silicon-containing dielectric material
Publication number
20040084411
Publication date
May 6, 2004
APPLIED MATERIALS, INC.
Yan Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching a silicon-containing dielectric material
Publication number
20040087153
Publication date
May 6, 2004
Yan Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High selectivity and residue free process for metal on thin dielect...
Publication number
20030148622
Publication date
Aug 7, 2003
APPLIED MATERIALS, INC.
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS