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Yan Fang
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of wet cleaning aluminum chamber parts
Patent number
9,387,521
Issue date
Jul 12, 2016
Lam Research Corporation
Hong Shih
B24 - GRINDING POLISHING
Information
Patent Grant
Method of removing damaged epoxy from electrostatic chuck
Patent number
9,105,676
Issue date
Aug 11, 2015
Lam Research Corporation
Hong Shih
B08 - CLEANING
Information
Patent Grant
System and method for testing an electrostatic chuck
Patent number
9,082,805
Issue date
Jul 14, 2015
Lam Research Corporation
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning aluminum plasma chamber parts
Patent number
8,545,639
Issue date
Oct 1, 2013
Lam Research Corporation
Hong Shih
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
Patent number
8,276,604
Issue date
Oct 2, 2012
Lam Research Corporation
Jason Augustino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning of bonded silicon electrodes
Patent number
8,221,552
Issue date
Jul 17, 2012
Lam Research Corporation
Duane Outka
B08 - CLEANING
Information
Patent Grant
Backside mounted electrode carriers and assemblies incorporating th...
Patent number
8,171,877
Issue date
May 8, 2012
Lam Research Corporation
Jason Augustino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for testing an electrostatic chuck
Patent number
8,143,904
Issue date
Mar 27, 2012
Lam Research Corporation
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processes for reconditioning multi-component electrodes
Patent number
8,075,701
Issue date
Dec 13, 2011
Lam Research Corporation
Armen Avoyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrochemical planarization end point detection
Patent number
6,752,916
Issue date
Jun 22, 2004
LSI Logic Corporation
Yan Fang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits and Methods f...
Publication number
20170040147
Publication date
Feb 9, 2017
LAM RESEARCH CORPORATION
Hong Shih
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
Publication number
20140150819
Publication date
Jun 5, 2014
LAM RESEARCH CORPORATION
Hong Shih
B08 - CLEANING
Information
Patent Application
TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...
Publication number
20140113453
Publication date
Apr 24, 2014
LAM RESEARCH CORPORATION
Hong Shih
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD OF REMOVING DAMAGED EPOXY FROM ELECTROSTATIC CHUCK
Publication number
20140083461
Publication date
Mar 27, 2014
LAM RESEARCH CORPORATION
Hong Shih
B08 - CLEANING
Information
Patent Application
Plasma Processing Devices With Corrosion Resistant Components
Publication number
20130160948
Publication date
Jun 27, 2013
LAM RESEARCH CORPORATION
Hong Shih
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
Publication number
20130104930
Publication date
May 2, 2013
LAM RESEARCH CORPORATION
Hong Shih
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
Systems Comprising Silicon Coated Gas Supply Conduits And Methods F...
Publication number
20130105083
Publication date
May 2, 2013
LAM RESEARCH CORPORATION
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RES...
Publication number
20130102156
Publication date
Apr 25, 2013
LAM RESEARCH CORPORATION
Tom Stevenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
Publication number
20120153971
Publication date
Jun 21, 2012
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
Publication number
20120013242
Publication date
Jan 19, 2012
LAM RESEARCH CORPORATION
Jason Augustino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR TESTING AN ELECTROSTATIC CHUCK
Publication number
20100090711
Publication date
Apr 15, 2010
Hong Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES
Publication number
20090325320
Publication date
Dec 31, 2009
LAM RESEARCH CORPORATION
Armen Avoyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...
Publication number
20090321018
Publication date
Dec 31, 2009
LAM RESEARCH CORPORATION
Jason Augustino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
Publication number
20090322199
Publication date
Dec 31, 2009
LAM RESEARCH CORPORATION
Jason Augustino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cleaning of bonded silicon electrodes
Publication number
20080236618
Publication date
Oct 2, 2008
LAM RESEARCH CORPORATION
Duane Outka
B08 - CLEANING