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Yan San Li
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Toronto, CA
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Patent Grant
Critical dimension for trench and vias
Patent number
8,293,545
Issue date
Oct 23, 2012
GLOBALFOUNDRIES Singapore Pte. Ltd.
Hai Cong
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CRITICAL DIMENSION FOR TRENCH AND VIAS
Publication number
20090108257
Publication date
Apr 30, 2009
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Hai Cong
H01 - BASIC ELECTRIC ELEMENTS