Yan Shao

Person

Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for high throughput using beam scan size and beam position i...
- Patent number 10,256,095
- Issue date Apr 9, 2019
- TEL Epion Inc.
- Soo Doo Chae
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etching process for etching Si-containing, Ge-...
- Patent number 9,324,567
- Issue date Apr 26, 2016
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for growing a thin film using a gas cluster ion beam
- Patent number 9,103,031
- Issue date Aug 11, 2015
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etching process for metal-containing materials
- Patent number 8,557,710
- Issue date Oct 15, 2013
- TEL Epion Inc.
- Yan Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etching process for Si-containing and Ge-conta...
- Patent number 8,513,138
- Issue date Aug 20, 2013
- TEL Epion Inc.
- Yan Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam etching process for achieving target etch proc...
- Patent number 8,512,586
- Issue date Aug 20, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for increasing the penetration depth of material infusion in...
- Patent number 7,883,999
- Issue date Feb 8, 2011
- TEL Epion Inc.
- Yan Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for adjusting a beam property in a gas cluster io...
- Patent number 7,696,495
- Issue date Apr 13, 2010
- TEL Epion Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR HIGH THROUGHPUT USING BEAM SCAN SIZE AND BEAM POSITION I...
- Publication number 20170077001
- Publication date Mar 16, 2017
- TEL Epion Inc.
- Soo Doo Chae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...
- Publication number 20150332924
- Publication date Nov 19, 2015
- TEL Epion Inc.
- Kenneth Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS
- Publication number 20150270135
- Publication date Sep 24, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130309872
- Publication date Nov 21, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...
- Publication number 20130196509
- Publication date Aug 1, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS
- Publication number 20130059444
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...
- Publication number 20130059445
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130059446
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Martin D. TABAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM
- Publication number 20090317564
- Publication date Dec 24, 2009
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR INCREASING THE PENETRATION DEPTH OF MATERIAL INFUSION IN...
- Publication number 20090191696
- Publication date Jul 30, 2009
- TEL Epion Inc.
- Yan Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR ADJUSTING A BEAM PROPERTY IN A GAS CLUSTER IO...
- Publication number 20090084977
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method for high throughput using beam scan size and beam position i...

Method and apparatus for beam deflection in a gas cluster ion beam...

Gas cluster ion beam etching process for etching Si-containing, Ge-...

Method and system for growing a thin film using a gas cluster ion beam

Gas cluster ion beam etching process for metal-containing materials

Gas cluster ion beam etching process for Si-containing and Ge-conta...

Gas cluster ion beam etching process for achieving target etch proc...

Method for increasing the penetration depth of material infusion in...

Method and device for adjusting a beam property in a gas cluster io...

Patents Applicationslast 30 patents

METHOD FOR HIGH THROUGHPUT USING BEAM SCAN SIZE AND BEAM POSITION I...

METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...

GAS CLUSTER ION BEAM ETCHING PROCESS

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...

Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS

GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...

METHOD AND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM

METHOD FOR INCREASING THE PENETRATION DEPTH OF MATERIAL INFUSION IN...

METHOD AND DEVICE FOR ADJUSTING A BEAM PROPERTY IN A GAS CLUSTER IO...