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Yan Sun
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Fremont, CA, US
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last 30 patents
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Patent Grant
Dark field wafer nano-defect inspection system with a singular beam
Patent number
10,345,246
Issue date
Jul 9, 2019
Tokyo Electron Limited
Xinkang Tian
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
METHODS AND SYSTEMS FOR DISTRIBUTED MACHINE LEARNING BASED ANOMALY...
Publication number
20240097999
Publication date
Mar 21, 2024
Pensando Systems Inc.
Yan Sun
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS
Publication number
20230395408
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Ivan MALEEV
G01 - MEASURING TESTING