Yan Zhang

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology in machine learning to characterize features
- Patent number 11,921,433
- Issue date Mar 5, 2024
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 11,704,463
- Issue date Jul 18, 2023
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement and control of wafer tilt for x-ray based metrology
- Patent number 11,513,085
- Issue date Nov 29, 2022
- KLA Corporation
- Barry Blasenheim
- G01 - MEASURING TESTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,997,345
- Issue date May 4, 2021
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Correction of angular error of plane-of-incidence azimuth of optica...
- Patent number 10,621,264
- Issue date Apr 14, 2020
- Onto Innovation Inc.
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,572,697
- Issue date Feb 25, 2020
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Correction of angular error of plane-of-incidence azimuth of optica...
- Patent number 10,296,554
- Issue date May 21, 2019
- Nanometrics Incorporated
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING
- Publication number 20250137920
- Publication date May 1, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
IN SITU SENSOR AND LOGIC FOR PROCESS CONTROL
- Publication number 20240255858
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Ye Feng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MACHINE-LEARNING IN MULTI-STEP SEMICONDUCTOR FABRICATION PROCESSES
- Publication number 20240096713
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Yan Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ADAPTIVE MODEL TRAINING FOR PROCESS CONTROL OF SEMICONDUCTOR MANUFA...
- Publication number 20240047248
- Publication date Feb 8, 2024
- LAM RESEARCH CORPORATION
- Dipongkar Talukder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Measurement And Control Of Wafer Tilt For X-Ray Based Metrology
- Publication number 20210262950
- Publication date Aug 26, 2021
- KLA Corporation
- Barry Blasenheim
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20210216695
- Publication date Jul 15, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES
- Publication number 20210035833
- Publication date Feb 4, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20200218844
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20190311083
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...
- Publication number 20190272305
- Publication date Sep 5, 2019
- Nanometrics Incorporated
- Pedro VAGOS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...
- Publication number 20140249768
- Publication date Sep 4, 2014
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

Optical metrology in machine learning to characterize features

Method of etch model calibration using optical scatterometry

Measurement and control of wafer tilt for x-ray based metrology

Method of etch model calibration using optical scatterometry

Correction of angular error of plane-of-incidence azimuth of optica...

Method of etch model calibration using optical scatterometry

Correction of angular error of plane-of-incidence azimuth of optica...

Patents Applicationslast 30 patents

SINGLE WAFER ORIENTATION TOOL-INDUCED SHIFT CLEANING

IN SITU SENSOR AND LOGIC FOR PROCESS CONTROL

MACHINE-LEARNING IN MULTI-STEP SEMICONDUCTOR FABRICATION PROCESSES

ADAPTIVE MODEL TRAINING FOR PROCESS CONTROL OF SEMICONDUCTOR MANUFA...

Measurement And Control Of Wafer Tilt For X-Ray Based Metrology

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...

CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...