Yana Qian

Follow

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Damascene process using PVD sputter carbon film as CMP stop layer f...
- Patent number 9,018,100
- Issue date Apr 28, 2015
- Western Digital (Fremont), LLC
- Yanfeng Chen
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
DAMASCENE PROCESS USING PVD SPUTTER CARBON FILM AS CMP STOP LAYER F...
- Publication number 20120111826
- Publication date May 10, 2012
- WESTERN DIGITAL (FREMONT), LLC
- YANFENG CHEN
- G11 - INFORMATION STORAGE