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Shanghai, CN
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last 30 patents
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Patent Grant
Shutter device, method of controlling same, photolithography machin...
Patent number
10,983,415
Issue date
Apr 20, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Zhiyong Jiang
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Shutter device
Patent number
10,928,704
Issue date
Feb 23, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yanfei Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SHUTTER BLADE DEVICE FOR LITHOGRAPHY MACHINE
Publication number
20200124939
Publication date
Apr 23, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yanfei WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SHUTTER DEVICE
Publication number
20200103727
Publication date
Apr 2, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yanfei WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SHUTTER DEVICE, METHOD OF CONTROLLING SAME, PHOTOLITHOGRAPHY MACHIN...
Publication number
20190391463
Publication date
Dec 26, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
ZHIYONG JIANG
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER