YANFEI WANG

Person

  • Shanghai, CN

Patents Grantslast 30 patents

  • Information Patent Grant

    Shutter device, method of controlling same, photolithography machin...

    • Patent number 10,983,415
    • Issue date Apr 20, 2021
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Zhiyong Jiang
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Shutter device

    • Patent number 10,928,704
    • Issue date Feb 23, 2021
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yanfei Wang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    SHUTTER BLADE DEVICE FOR LITHOGRAPHY MACHINE

    • Publication number 20200124939
    • Publication date Apr 23, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yanfei WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SHUTTER DEVICE

    • Publication number 20200103727
    • Publication date Apr 2, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Yanfei WANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SHUTTER DEVICE, METHOD OF CONTROLLING SAME, PHOTOLITHOGRAPHY MACHIN...

    • Publication number 20190391463
    • Publication date Dec 26, 2019
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • ZHIYONG JIANG
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER