Yanfu Lu

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Film deposition systems and methods
- Patent number 12,163,227
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for silicon germanium uniformity control using multiple pre...
- Patent number 12,057,314
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures, semiconductor processing systems, an...
- Patent number 11,959,173
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20240331984
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20240332016
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20240209510
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR FORMING MULTILAYER STRUCTURES ON A SUBSTRATE AND RELATE...
- Publication number 20240203734
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Maritza Mujica
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR FORMING SEMICONDUCTOR STACKED STRUCTURES ON A SUBSTRATE...
- Publication number 20240204057
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL LAYER DEPOSITION METHODS, MATERIAL LAYER STACKS, SEMICONDU...
- Publication number 20240203733
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Omar Elleuch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION
- Publication number 20240071805
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Han Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...
- Publication number 20240068103
- Publication date Feb 29, 2024
- ASM IP HOLDING, B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...
- Publication number 20220298643
- Publication date Sep 22, 2022
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION SYSTEMS AND METHODS
- Publication number 20220282370
- Publication date Sep 8, 2022
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20210358741
- Publication date Nov 18, 2021
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Film deposition systems and methods

Methods for silicon germanium uniformity control using multiple pre...

Methods of forming structures, semiconductor processing systems, an...

Patents Applicationslast 30 patents

PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

METHODS FOR FORMING MULTILAYER STRUCTURES ON A SUBSTRATE AND RELATE...

METHODS FOR FORMING SEMICONDUCTOR STACKED STRUCTURES ON A SUBSTRATE...

MATERIAL LAYER DEPOSITION METHODS, MATERIAL LAYER STACKS, SEMICONDU...

METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...

METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AN...

FILM DEPOSITION SYSTEMS AND METHODS

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...