Yang Guo

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead assembly with heated showerhead
- Patent number 12,170,186
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single process volume to perform high-pressure and low-pressure pro...
- Patent number 12,012,652
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Kelvin Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internally divisible process chamber using a shutter disk assembly
- Patent number 11,830,710
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- John Joseph Mazzocco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internally divisible process chamber using a shutter disk assembly
- Patent number 11,545,347
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- John Joseph Mazzocco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabricating a recursive flow gas distribution stack using multiple...
- Patent number 11,371,148
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Sumit Agarwal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for producing low angle depositions
- Patent number 11,170,982
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Showerhead Assembly with Heated Showerhead
- Publication number 20240068096
- Publication date Feb 29, 2024
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER
- Publication number 20240018646
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- ANANTHA SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
- Publication number 20230395356
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY WITH HEATED SHOWERHEAD
- Publication number 20230335377
- Publication date Oct 19, 2023
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIASABLE ROTATING PEDESTAL
- Publication number 20230282506
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Anantha Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNALLY DIVISIBLE PROCESS CHAMBER USING A SHUTTER DISK ASSEMBLY
- Publication number 20220319822
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- John Joseph MAZZOCCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT SHOWERHEAD
- Publication number 20220307131
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNALLY DIVISIBLE PROCESS CHAMBER USING A SHUTTER DISK ASSEMBLY
- Publication number 20220139684
- Publication date May 5, 2022
- John Joseph MAZZOCCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING A RECURSIVE FLOW GAS DISTRIBUTION STACK USING MULTIPLE...
- Publication number 20220056584
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Sumit Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20220028710
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHODS AND APPARATUS FOR PRODUCING LOW ANGLE DEPOSITIONS
- Publication number 20200051794
- Publication date Feb 13, 2020
- ANANTHA K. SUBRAMANI
- B08 - CLEANING
Information Patent Application
SINGLE PROCESS VOLUME TO PERFORM HIGH-PRESSURE AND LOW-PRESSURE PRO...
- Publication number 20190352774
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Showerhead assembly with heated showerhead

Single process volume to perform high-pressure and low-pressure pro...

Hot showerhead

Internally divisible process chamber using a shutter disk assembly

Internally divisible process chamber using a shutter disk assembly

Fabricating a recursive flow gas distribution stack using multiple...

Methods and apparatus for producing low angle depositions

Patents Applicationslast 30 patents

Showerhead Assembly with Heated Showerhead

ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER

PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...

SHOWERHEAD ASSEMBLY WITH HEATED SHOWERHEAD

BIASABLE ROTATING PEDESTAL

INTERNALLY DIVISIBLE PROCESS CHAMBER USING A SHUTTER DISK ASSEMBLY

HOT SHOWERHEAD

INTERNALLY DIVISIBLE PROCESS CHAMBER USING A SHUTTER DISK ASSEMBLY

FABRICATING A RECURSIVE FLOW GAS DISTRIBUTION STACK USING MULTIPLE...

DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS

METHODS AND APPARATUS FOR PRODUCING LOW ANGLE DEPOSITIONS

SINGLE PROCESS VOLUME TO PERFORM HIGH-PRESSURE AND LOW-PRESSURE PRO...