Yang QING

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Patents Grantslast 30 patents

Information Patent Grant
Topography driven OPC and lithography flow
- Patent number 9,064,084
- Issue date Jun 23, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Ushasree Katakamsetty
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Etch failure prediction based on wafer resist top loss
- Patent number 8,898,597
- Issue date Nov 25, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Qing Yang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
ETCH FAILURE PREDICTION BASED ON WAFER RESIST TOP LOSS
- Publication number 20140282286
- Publication date Sep 18, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Qing YANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TOPOGRAPHY DRIVEN OPC AND LITHOGRAPHY FLOW
- Publication number 20140282300
- Publication date Sep 18, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Ushasree KATAKAMSETTY
- G06 - COMPUTING CALCULATING COUNTING