Yang Xie

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system with grounded capacitive sample proximity sensor
- Patent number 10,837,803
- Issue date Nov 17, 2020
- KLA Corporation
- Yang Xie
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
Inspection System with Grounded Capacitive Sample Proximity Sensor
- Publication number 20200326211
- Publication date Oct 15, 2020
- KLA-Tencor Corporation
- Yang Xie
- G01 - MEASURING TESTING