Yanko Sarov

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam particle beam system and method for operating same
- Patent number 12,255,040
- Issue date Mar 18, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system
- Patent number 11,239,054
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system
- Patent number 10,854,423
- Issue date Dec 1, 2020
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for swiveling a mirror element with two degrees of swiveling...
- Patent number 10,761,317
- Issue date Sep 1, 2020
- Carl Zeiss SMT GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Mirror device
- Patent number 10,101,507
- Issue date Oct 16, 2018
- Carl Zeiss SMT GmbH
- Yanko Sarov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE PARTICLE BEAM SYSTEM WITH PROLONGED MAINTENANCE INTERVAL
- Publication number 20250232943
- Publication date Jul 17, 2025
- Carl Zeiss MultiSEM GmbH
- Ticia Buhr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-OPTICAL ELEMENT
- Publication number 20250180890
- Publication date Jun 5, 2025
- Carl Zeiss SMT GMBH
- Yanko SAROV
- G02 - OPTICS
Information Patent Application
MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...
- Publication number 20240379322
- Publication date Nov 14, 2024
- Carl Zeiss MultiSEM GmbH
- Alexander Wertz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATI...
- Publication number 20240371596
- Publication date Nov 7, 2024
- Carl Zeiss MultiSEM GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-MIRROR ARRAY
- Publication number 20240248408
- Publication date Jul 25, 2024
- Carl Zeiss SMT GMBH
- Moritz Becker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...
- Publication number 20220392734
- Publication date Dec 8, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME
- Publication number 20210217577
- Publication date Jul 15, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20210066037
- Publication date Mar 4, 2021
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20190259575
- Publication date Aug 22, 2019
- CARL ZEISS MICROSCOPY GMBH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING...
- Publication number 20170363861
- Publication date Dec 21, 2017
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20170276842
- Publication date Sep 28, 2017
- Carl Zeiss SMT GMBH
- Yanko Sarov
- G02 - OPTICS

Yanko Sarov

Person

Patents Grantslast 30 patents

Multi-beam particle beam system and method for operating same

Multi-beam particle beam system

Multi-beam particle beam system

Device for swiveling a mirror element with two degrees of swiveling...

Mirror device

Patents Applicationslast 30 patents

MULTIPLE PARTICLE BEAM SYSTEM WITH PROLONGED MAINTENANCE INTERVAL

MICRO-OPTICAL ELEMENT

MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...

MULTIPLE CHARGED PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATI...

MULTI-MIRROR ARRAY

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...

MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME

MULTI-BEAM PARTICLE BEAM SYSTEM

MULTI-BEAM PARTICLE BEAM SYSTEM

DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING...

MIRROR DEVICE