Yanming Zhao

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Laser-sustained plasma light source
- Patent number 9,526,158
- Issue date Dec 20, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source
- Patent number 9,516,733
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-sustained plasma light source
- Patent number 9,099,292
- Issue date Aug 4, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive optics for compensating aberrations in light-sustained pla...
- Patent number 9,097,577
- Issue date Aug 4, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
Adaptable illuminating apparatus, system, and method for extreme ul...
- Patent number 9,046,500
- Issue date Jun 2, 2015
- KLA-Tencor Corporation
- Damon Kvamme
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ADAPTABLE ILLUMINATING APPARATUS, SYSTEM, AND METHOD FOR EXTREME UL...
- Publication number 20140175308
- Publication date Jun 26, 2014
- KLA-Tencor Corporation
- Damon Kvamme
- G02 - OPTICS
Information Patent Application
ADAPTIVE OPTICS FOR COMPENSATING ABERRATIONS IN LIGHT-SUSTAINED PLA...
- Publication number 20130003384
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- G02 - OPTICS