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Leuven, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device having through-substrate vias
Patent number
9,646,930
Issue date
May 9, 2017
IMEC
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating through substrate vias
Patent number
8,809,188
Issue date
Aug 19, 2014
IMEC
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming 3D-interconnect structures with airgaps
Patent number
8,647,920
Issue date
Feb 11, 2014
IMEC VZW
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE HAVING THROUGH-SUBSTRATE VIAS
Publication number
20150035168
Publication date
Feb 5, 2015
IMEC
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING 3D-INTERCONNECT STRUCTURES WITH AIRGAPS
Publication number
20120013022
Publication date
Jan 19, 2012
IMEC
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING THROUGH SUBSTRATE VIAS
Publication number
20110089572
Publication date
Apr 21, 2011
IMEC
Deniz Sabuncuoglu Tezcan
H01 - BASIC ELECTRIC ELEMENTS