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Yannan Liu
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Beijing, CN
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last 30 patents
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Patent Grant
Laser cleaning system
Patent number
11,338,333
Issue date
May 24, 2022
Institute of Semiconductors, Chinese Academy of Sciences
Xuechun Lin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
LASER CLEANING SYSTEM
Publication number
20210138514
Publication date
May 13, 2021
Institute of Semiconductors, Chinese Academy of Sciences
Xuechun Lin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR