Membership
Tour
Register
Log in
Yannick Bourgin
Follow
Person
Jena, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Illumination unit and device for lithographic exposure
Patent number
10,101,665
Issue date
Oct 16, 2018
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
Uwe Detlef Zeitner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Illumination Unit and Device for Lithographic Exposure
Publication number
20170068168
Publication date
Mar 9, 2017
Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
Uwe Detlef Zeitner
G02 - OPTICS