TREA

Yanqin WANG

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  • Chengdu, CN
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Patents Grantslast 30 patents

  • Information Patent Grant

    Secondary imaging optical lithography method and apparatus
    • Patent number 11,693,320
    • Issue date Jul 4, 2023
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Methods and apparatuses for coating photoresist
    • Patent number 11,061,330
    • Issue date Jul 13, 2021
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Super-resolution imaging photolithography
    • Patent number 9,958,784
    • Issue date May 1, 2018
    • THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents