Yanqin WANG

Person

Chengdu, CN

People

Patents Grantslast 30 patents

Information Patent Grant
F-P sensor probe, absolute distance measurement device, and absolut...
- Patent number 12,174,322
- Issue date Dec 24, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G01 - MEASURING TESTING
Information Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
- Patent number 12,078,937
- Issue date Sep 3, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Secondary imaging optical lithography method and apparatus
- Patent number 11,693,320
- Issue date Jul 4, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatuses for coating photoresist
- Patent number 11,061,330
- Issue date Jul 13, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Super-resolution imaging photolithography
- Patent number 9,958,784
- Issue date May 1, 2018
- THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
- Publication number 20240272558
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...
- Publication number 20240264285
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G01 - MEASURING TESTING
Information Patent Application
ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...
- Publication number 20220068617
- Publication date Mar 3, 2022
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
- Publication number 20210200079
- Publication date Jul 1, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUSES FOR COATING PHOTORESIST
- Publication number 20200233306
- Publication date Jul 23, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS
- Publication number 20200150538
- Publication date May 14, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...
- Publication number 20190137793
- Publication date May 9, 2019
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
- Publication number 20160259253
- Publication date Sep 8, 2016
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yanqin WANG

Person

Patents Grantslast 30 patents

F-P sensor probe, absolute distance measurement device, and absolut...

Near-field lithography immersion system, immersion unit and interfa...

Secondary imaging optical lithography method and apparatus

Methods and apparatuses for coating photoresist

Super-resolution imaging photolithography

Patents Applicationslast 30 patents

NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...

F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...

ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...

NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT

METHODS AND APPARATUSES FOR COATING PHOTORESIST

SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS

BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...

SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY