Yansung Kim

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Monte Sereno, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Edge exclusion control with adjustable plasma exclusion zone ring
- Patent number 9,799,496
- Issue date Oct 24, 2017
- Lam Research Corporation
- Keechan Kim
- B08 - CLEANING
Information Patent Grant
Edge exclusion control with adjustable plasma exclusion zone ring
- Patent number 9,184,030
- Issue date Nov 10, 2015
- Lam Research Corporation
- Keechan Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Edge Exclusion Control With Adjustable Plasma Exclusion Zone Ring
- Publication number 20180025893
- Publication date Jan 25, 2018
- LAM RESEARCH CORPORATION
- Keechan Kim
- B08 - CLEANING
Information Patent Application
EDGE EXCLUSION CONTROL WITH ADJUSTABLE PLASMA EXCLUSION ZONE RING
- Publication number 20160042927
- Publication date Feb 11, 2016
- LAM RESEARCH CORPORATION
- Keechan Kim
- B08 - CLEANING
Information Patent Application
EDGE EXCLUSION CONTROL WITH ADJUSTABLE PLASMA EXCLUSION ZONE RING
- Publication number 20140020708
- Publication date Jan 23, 2014
- LAM RESEARCH CORPORATION
- Keechan Kim
- B08 - CLEANING