Yanxiang Shi

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing system and method using radio frequency and micro...
- Patent number 12,131,887
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yunho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system and method using radio frequency (RF) and...
- Patent number 11,887,815
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Yunho Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma Processing System And Method Using Radio Frequency And Micro...
- Publication number 20220246402
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Yunho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing System and Method Using Radio Frequency (RF) and...
- Publication number 20220246386
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Yunho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MA...
- Publication number 20210233775
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Du Zhang
- H01 - BASIC ELECTRIC ELEMENTS