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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Structures and methods for processing a semiconductor substrate
Patent number
12,286,706
Issue date
Apr 29, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Yi Shen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD apparatus with multi-zone thickness control
Patent number
10,982,327
Issue date
Apr 20, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD apparatus with multi-zone thickness control
Patent number
10,975,473
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD apparatus with multi-zone thickness control
Patent number
10,450,655
Issue date
Oct 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electromagnetic detection device and semiconductor manufacturing sy...
Patent number
9,953,888
Issue date
Apr 24, 2018
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
Publication number
20230383399
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Yi SHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
Publication number
20220275500
Publication date
Sep 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Yi SHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD APPARATUS WITH MULTI-ZONE THICKNESS CONTROL
Publication number
20200017973
Publication date
Jan 16, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD APPARATUS WITH MULTI-ZONE THICKNESS CONTROL
Publication number
20190360103
Publication date
Nov 28, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD APPARATUS WITH MULTI-ZONE THICKNESS CONTROL
Publication number
20190127852
Publication date
May 2, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Chung-Wei Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...