Yao-Hsiung Kung

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Tao Yuan Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
Wafer cleaning apparatus with multiple wash-heads
- Patent number 7,252,099
- Issue date Aug 7, 2007
- Nan Ya Technology Corporation
- Chih-Kun Chen
- B08 - CLEANING
Information Patent Grant
Method and apparatus for detecting wafer flaw
- Patent number 6,941,811
- Issue date Sep 13, 2005
- Nan Ya Technology Corporation
- Chih-Kun Chen
- G01 - MEASURING TESTING
Information Patent Grant
Device used for detecting clamping force of processed object and me...
- Patent number 6,920,796
- Issue date Jul 26, 2005
- Nan Ya Technology Corporation
- Chih-Kun Chen
- G01 - MEASURING TESTING
Information Patent Grant
Humidity sensor and fabrication method thereof
- Patent number 6,834,547
- Issue date Dec 28, 2004
- Nanya Technology Corporation
- Chih-Kun Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEVICE USED FOR DETECTING CLAMPING FORCE OF PROCESSED OBJECT AND ME...
- Publication number 20050103121
- Publication date May 19, 2005
- NAN YA TECHNOLOGY CORPORATION
- Chih-Kun Chen
- G01 - MEASURING TESTING
Information Patent Application
Wafer cleaning apparatus with multiple wash-heads
- Publication number 20050051200
- Publication date Mar 10, 2005
- Chih-Kun Chen
- B08 - CLEANING
Information Patent Application
Method and apparatus for detecting wafer flaw
- Publication number 20050028594
- Publication date Feb 10, 2005
- Chih-Kun Chen
- G01 - MEASURING TESTING
Information Patent Application
Humidity sensor and fabrication method thereof
- Publication number 20040040378
- Publication date Mar 4, 2004
- NANYA TECHNOLOGY CORPORATION
- Chih-Kun Chen
- G01 - MEASURING TESTING
Information Patent Application
Polishing pad showing intrinsic abrasion and fabrication method the...
- Publication number 20040038631
- Publication date Feb 26, 2004
- NANYA TECHNOLOGY CORPORATION
- Chih-Kun Chen
- B24 - GRINDING POLISHING