Yao-Yuan SHANG

Person

Taichung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer cleaning method
- Patent number 12,087,602
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Shu Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning system and method
- Patent number 11,742,227
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Shu Tseng
- B08 - CLEANING
Information Patent Grant
Metrology method in wafer transportation
- Patent number 11,387,123
- Issue date Jul 12, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Powen Huang
- B08 - CLEANING
Information Patent Grant
Metrology method in wafer transportation
- Patent number 10,651,066
- Issue date May 12, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Powen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning system and method
- Patent number 10,515,833
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology method in reticle transportation
- Patent number 10,345,716
- Issue date Jul 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Yuan Shang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cup-wash device, semiconductor apparatus, and cup cleaning method
- Patent number 9,919,350
- Issue date Mar 20, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu Tseng
- B08 - CLEANING
Information Patent Grant
Brush, back surface treatment assembly and method for cleaning subs...
- Patent number 9,770,092
- Issue date Sep 26, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Shu Tseng
- A46 - BRUSHWARE
Information Patent Grant
Method and system for positioning wafer in semiconductor manufactur...
- Patent number 9,570,334
- Issue date Feb 14, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Yuan Shang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER CLEANING SYSTEM
- Publication number 20240371667
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Shu TSENG
- B08 - CLEANING
Information Patent Application
WAFER CLEANING METHOD
- Publication number 20230360938
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY METHOD IN WAFER TRANSPORTATION
- Publication number 20200251365
- Publication date Aug 6, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Powen HUANG
- G01 - MEASURING TESTING
Information Patent Application
WAFER CLEANING SYSTEM AND METHOD
- Publication number 20200135516
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY METHOD IN RETICLE TRANSPORTATION
- Publication number 20190163070
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Yuan SHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD IN WAFER TRANSPORTATION
- Publication number 20190164792
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Powen HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BRUSH, BACK SURFACE TREATMENT ASSEMBLY AND METHOD FOR CLEANING SUBS...
- Publication number 20170049221
- Publication date Feb 23, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Shu TSENG
- A46 - BRUSHWARE
Information Patent Application
METHOD AND SYSTEM FOR POSITIONING WAFER IN SEMICONDUCTOR MANUFACTUR...
- Publication number 20160293471
- Publication date Oct 6, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Yao-Yuan SHANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CUP-WASH DEVICE, SEMICONDUCTOR APPARATUS, AND CUP CLEANING METHOD
- Publication number 20160276207
- Publication date Sep 22, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- B08 - CLEANING
Information Patent Application
WAFER CLEANING SYSTEM AND METHOD
- Publication number 20150214027
- Publication date Jul 30, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuo-Shu TSENG
- H01 - BASIC ELECTRIC ELEMENTS

Yao-Yuan SHANG

Person

Patents Grantslast 30 patents

Wafer cleaning method

Wafer cleaning system and method

Metrology method in wafer transportation

Metrology method in wafer transportation

Wafer cleaning system and method

Metrology method in reticle transportation

Cup-wash device, semiconductor apparatus, and cup cleaning method

Brush, back surface treatment assembly and method for cleaning subs...

Method and system for positioning wafer in semiconductor manufactur...

Patents Applicationslast 30 patents

WAFER CLEANING SYSTEM

WAFER CLEANING METHOD

METROLOGY METHOD IN WAFER TRANSPORTATION

WAFER CLEANING SYSTEM AND METHOD

METROLOGY METHOD IN RETICLE TRANSPORTATION

METROLOGY METHOD IN WAFER TRANSPORTATION

BRUSH, BACK SURFACE TREATMENT ASSEMBLY AND METHOD FOR CLEANING SUBS...

METHOD AND SYSTEM FOR POSITIONING WAFER IN SEMICONDUCTOR MANUFACTUR...

CUP-WASH DEVICE, SEMICONDUCTOR APPARATUS, AND CUP CLEANING METHOD

WAFER CLEANING SYSTEM AND METHOD