Yaobo Yin

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Megasonic precision cleaning of semiconductor process equipment com...
- Patent number 8,607,806
- Issue date Dec 17, 2013
- Lam Research Corporation
- Yaobo Yin
- B08 - CLEANING
Information Patent Grant
Megasonic precision cleaning of semiconductor process equipment com...
- Patent number 8,327,861
- Issue date Dec 11, 2012
- Lam Research Corporation
- Yaobo Yin
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 8,215,321
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 7,942,973
- Issue date May 17, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methodology for cleaning of surface metal contamination from electr...
- Patent number 7,578,889
- Issue date Aug 25, 2009
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Megasonic Precision Cleaning Of Semiconductor Process Equipment Com...
- Publication number 20140053884
- Publication date Feb 27, 2014
- LAM RESEARCH CORPORATION
- Yaobo Yin
- B08 - CLEANING
Information Patent Application
Megasonic Precision Cleaning of Semiconductor Process Equipment Com...
- Publication number 20130056041
- Publication date Mar 7, 2013
- Yaobo Yin
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...
- Publication number 20110180117
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
Methodology for cleaning of surface metal contamination from electr...
- Publication number 20080236620
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
Megasonic precision cleaning of semiconductor process equipment com...
- Publication number 20080142055
- Publication date Jun 19, 2008
- LAM RESEARCH, CORP.
- Yaobo Yin
- B08 - CLEANING
Information Patent Application
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Publication number 20080092920
- Publication date Apr 24, 2008
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING