Yaoling Pan

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Capacitive sensor housing for chamber condition monitoring
- Patent number 12,163,911
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Grant
Differential capacitive sensor for in-situ film thickness and diele...
- Patent number 12,123,090
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Patrick Tae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS and NEMS structures
- Patent number 12,006,209
- Issue date Jun 11, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensors and system for in-situ edge ring erosion monitor
- Patent number 12,009,236
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 11,959,868
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Differential capacitive sensors for in-situ film thickness and diel...
- Patent number 11,781,214
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Patrick Tae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capping plate for panel scale packaging of MEMS products
- Patent number 11,685,649
- Issue date Jun 27, 2023
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive sensor for chamber condition monitoring
- Patent number 11,581,206
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant process monitor
- Patent number 11,551,905
- Issue date Jan 10, 2023
- Intel Corporation
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
- Patent number 11,545,346
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensor housing for chamber condition monitoring
- Patent number 11,415,538
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Grant
Integrated packaging devices and methods with backside interconnect...
- Patent number 11,282,760
- Issue date Mar 22, 2022
- OBSIDIAN SENSORS, INC.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated packaging devices and methods with backside interconnect...
- Patent number 10,453,766
- Issue date Oct 22, 2019
- OBSIDIAN SENSORS, INC.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Panel level packaging for MEMS application
- Patent number 10,150,667
- Issue date Dec 11, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked vias for vertical integration
- Patent number 10,131,534
- Issue date Nov 20, 2018
- Snaptrack, Inc.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interferometric modulator mirror design without metal layer in the...
- Patent number 9,715,156
- Issue date Jul 25, 2017
- QUALCOMM Incorporated
- Tallis Young Chang
- G02 - OPTICS
Information Patent Grant
EMS device having flexible support posts
- Patent number 9,477,076
- Issue date Oct 25, 2016
- QUALCOMM MEMS Technologies, Inc.
- John Hyunchul Hong
- G02 - OPTICS
Information Patent Grant
Thin film stack with surface-conditioning buffer layers and related...
- Patent number 8,817,358
- Issue date Aug 26, 2014
- QUALCOMM MEMS Technologies, Inc.
- John Hyunchul Hong
- G02 - OPTICS
Information Patent Grant
Amorphous oxide semiconductor thin film transistor fabrication method
- Patent number 8,797,303
- Issue date Aug 5, 2014
- QUALCOMM MEMS Technologies, Inc.
- Cheonhong Kim
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION
- Publication number 20240219337
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...
- Publication number 20240002999
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- PATRICK TAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230343568
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20230103165
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
- Publication number 20220341867
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION
- Publication number 20220244205
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
- Publication number 20210280400
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING
- Publication number 20210278360
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Yaoling Pan
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
- Publication number 20210280443
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSORS AND CAPACITIVE SENSING LOCATIONS FOR PLASMA CHAM...
- Publication number 20210280399
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFERENTIAL CAPACITIVE SENSORS FOR IN-SITU FILM THICKNESS AND DIEL...
- Publication number 20210033557
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- PATRICK TAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPPING PLATE FOR PANEL SCALE PACKAGING OF MEMS PRODUCTS
- Publication number 20210002130
- Publication date Jan 7, 2021
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20200407219
- Publication date Dec 31, 2020
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
- Publication number 20200335368
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Yaoling PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PACKAGING DEVICES AND METHODS WITH BACKSIDE INTERCONNECT...
- Publication number 20200294878
- Publication date Sep 17, 2020
- Obsidian Sensors, Inc.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANT PROCESS MONITOR
- Publication number 20190287758
- Publication date Sep 19, 2019
- Yaoling PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LEVEL INTEGRATED OPTICS IN PACKAGING FOR IMAGING SENSOR APPLI...
- Publication number 20180364439
- Publication date Dec 20, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling PAN
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
PANEL LEVEL PACKAGING FOR MEMS APPLICATION
- Publication number 20180230004
- Publication date Aug 16, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling PAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NUCLEOTIDE SENSING DEVICE HAVING A NANOPORE FORMED IN AN INORGANIC...
- Publication number 20180163266
- Publication date Jun 14, 2018
- QUALCOMM Incorporated
- Tallis Young CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PACKAGING DEVICES AND METHODS WITH BACKSIDE INTERCONNECT...
- Publication number 20180138102
- Publication date May 17, 2018
- OBSIDIAN SENSORS, INC.
- Yaoling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WIRELESS CHARGING RECEIVER USING PIEZOELECTRIC MATERIAL
- Publication number 20170085096
- Publication date Mar 23, 2017
- QUALCOMM Incorporated
- John Hyunchul Hong
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PRE-RELEASE ENCAPSULATION OF ELECTROMECHANICAL SYSTEM DEVICES
- Publication number 20160299332
- Publication date Oct 13, 2016
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Tallis Young Chang
- G02 - OPTICS
Information Patent Application
INTERFEROMETRIC MODULATOR MIRROR DESIGN WITHOUT METAL LAYER IN THE...
- Publication number 20160274436
- Publication date Sep 22, 2016
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Tallis Young Chang
- G02 - OPTICS
Information Patent Application
INTEGRATED DIFFUSER WITH VARIABLE-INDEX MICROLENS LAYER
- Publication number 20160231471
- Publication date Aug 11, 2016
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Jian Jim Ma
- G02 - OPTICS
Information Patent Application
CREEP RESISTANT REFLECTIVE STRUCTURE IN MEMS DISPLAY
- Publication number 20160232858
- Publication date Aug 11, 2016
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Yaoling Pan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAUNCH CONTROL OF MOVABLE LAYER IN ELECTROMECHANICAL DEVICES
- Publication number 20160149516
- Publication date May 26, 2016
- QUALCOMM MEMS TECHNOLOGIES, INC.
- John Hyunchul Hong
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ABSORBER STACK FOR MULTI-STATE INTERFEROMETRIC MODULATORS
- Publication number 20150355454
- Publication date Dec 10, 2015
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Jian Jim Ma
- G02 - OPTICS
Information Patent Application
FLEXIBLE EMS DEVICE USING ORGANIC MATERIALS
- Publication number 20150277097
- Publication date Oct 1, 2015
- QUALCOMM MEMS TECHNOLOGIES, INC.
- John Hyunchul Hong
- G02 - OPTICS
Information Patent Application
EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER
- Publication number 20150277098
- Publication date Oct 1, 2015
- QUALCOMM MEMS TECHNOLOGIES, INC.
- John Hyunchul Hong
- G02 - OPTICS
Information Patent Application
EMS DEVICE HAVING FLEXIBLE SUPPORT POSTS
- Publication number 20150277099
- Publication date Oct 1, 2015
- QUALCOMM MEMS TECHNOLOGIES, INC.
- John Hyunchul Hong
- G02 - OPTICS

Yaoling Pan

Person

Patents Grantslast 30 patents

Capacitive sensor housing for chamber condition monitoring

Differential capacitive sensor for in-situ film thickness and diele...

MEMS and NEMS structures

Sensors and system for in-situ edge ring erosion monitor

Capacitive sensor for monitoring gas concentration

Differential capacitive sensors for in-situ film thickness and diel...

Capping plate for panel scale packaging of MEMS products

Capacitive sensor for chamber condition monitoring

Resonant process monitor

Capacitive sensing data integration for plasma chamber condition mo...

Capacitive sensor housing for chamber condition monitoring

Integrated packaging devices and methods with backside interconnect...

Integrated packaging devices and methods with backside interconnect...

Panel level packaging for MEMS application

Stacked vias for vertical integration

Interferometric modulator mirror design without metal layer in the...

EMS device having flexible support posts

Thin film stack with surface-conditioning buffer layers and related...

Amorphous oxide semiconductor thin film transistor fabrication method

Patents Applicationslast 30 patents

CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION

DIFFERENTIAL CAPACITIVE SENSOR FOR IN-SITU FILM THICKNESS AND DIELE...

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING

CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION

CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...

CAPACITIVE SENSOR HOUSING FOR CHAMBER CONDITION MONITORING

CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING

CAPACITIVE SENSORS AND CAPACITIVE SENSING LOCATIONS FOR PLASMA CHAM...

DIFFERENTIAL CAPACITIVE SENSORS FOR IN-SITU FILM THICKNESS AND DIEL...

CAPPING PLATE FOR PANEL SCALE PACKAGING OF MEMS PRODUCTS

MEMS AND NEMS STRUCTURES

SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR

INTEGRATED PACKAGING DEVICES AND METHODS WITH BACKSIDE INTERCONNECT...

RESONANT PROCESS MONITOR

WAFER LEVEL INTEGRATED OPTICS IN PACKAGING FOR IMAGING SENSOR APPLI...

PANEL LEVEL PACKAGING FOR MEMS APPLICATION

NUCLEOTIDE SENSING DEVICE HAVING A NANOPORE FORMED IN AN INORGANIC...

INTEGRATED PACKAGING DEVICES AND METHODS WITH BACKSIDE INTERCONNECT...

WIRELESS CHARGING RECEIVER USING PIEZOELECTRIC MATERIAL

PRE-RELEASE ENCAPSULATION OF ELECTROMECHANICAL SYSTEM DEVICES

INTERFEROMETRIC MODULATOR MIRROR DESIGN WITHOUT METAL LAYER IN THE...

INTEGRATED DIFFUSER WITH VARIABLE-INDEX MICROLENS LAYER

CREEP RESISTANT REFLECTIVE STRUCTURE IN MEMS DISPLAY

LAUNCH CONTROL OF MOVABLE LAYER IN ELECTROMECHANICAL DEVICES

ABSORBER STACK FOR MULTI-STATE INTERFEROMETRIC MODULATORS

FLEXIBLE EMS DEVICE USING ORGANIC MATERIALS

EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER

EMS DEVICE HAVING FLEXIBLE SUPPORT POSTS