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Yaozhi Hu
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
Patent number
8,236,706
Issue date
Aug 7, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20120298039
Publication date
Nov 29, 2012
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE...
Publication number
20100151694
Publication date
Jun 17, 2010
Mattson Technology, Inc.
Bruce W. Peuse
H01 - BASIC ELECTRIC ELEMENTS