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last 30 patents
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Patent Grant
Exposure system, exposure device and exposure method
Patent number
10,942,458
Issue date
Mar 9, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Ke Lan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
EXPOSURE SYSTEM, EXPOSURE DEVICE AND EXPOSURE METHOD
Publication number
20190163074
Publication date
May 30, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Ke LAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY