Yashushi Takakura

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma generation and control using a dual frequency RF source
- Patent number 7,431,857
- Issue date Oct 7, 2008
- Applied Materials, Inc.
- Steven C. Shannon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATION AND CONTROL USING A DUAL FREQUENCY RF SOURCE
- Publication number 20070006971
- Publication date Jan 11, 2007
- Applied Materials, Inc.
- Steven C. Shannon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma generation and control using a dual frequency RF source
- Publication number 20050034816
- Publication date Feb 17, 2005
- APPLIED MATERIALS, INC.
- Steven C. Shannon
- H01 - BASIC ELECTRIC ELEMENTS