Yasuaki AMANO

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Munich, DE

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Patents Grantslast 30 patents

Information Patent Grant
Wafer support system, wafer support device, system comprising a waf...
- Patent number 10,937,681
- Issue date Mar 2, 2021
- SUSS MICROTEC LITHOGRAPHY GMBH
- Yasuaki Amano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
WAFER SUPPORT SYSTEM, WAFER SUPPORT DEVICE, SYSTEM COMPRISING A WAF...
- Publication number 20190096733
- Publication date Mar 28, 2019
- SUSS MicroTec Lithography GmbH
- Yasuaki AMANO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS