Yasuaki Kikuchi

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thermocouple structure, heat treatment apparatus, and method of man...
- Patent number 11,815,407
- Issue date Nov 14, 2023
- Tokyo Electron Limited
- Hisashi Inoue
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,674,224
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and film deposition method
- Patent number 11,581,201
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus
- Patent number 11,569,098
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature monitoring apparatus, heat treatment apparatus, and tem...
- Patent number 11,257,697
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,114,319
- Issue date Sep 7, 2021
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 10,431,479
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230422348
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILM FORMING METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20230009720
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMOCOUPLE STRUCTURE, HEAT TREATMENT APPARATUS, AND METHOD OF MAN...
- Publication number 20210063247
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- G01 - MEASURING TESTING
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200340111
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND FILM FORMING M...
- Publication number 20200340116
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20200303222
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20200168486
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MONITORING APPARATUS, HEAT TREATMENT APPARATUS, AND TEM...
- Publication number 20190341284
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20190341281
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20180197759
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Yasuaki Kikuchi

Person

Patents Grantslast 30 patents

Thermocouple structure, heat treatment apparatus, and method of man...

Heat treatment apparatus, heat treatment method, and film forming m...

Film forming method and film forming apparatus

Heat treatment apparatus and film deposition method

Heat treatment apparatus

Temperature monitoring apparatus, heat treatment apparatus, and tem...

Heat treatment apparatus and heat treatment method

Heat treatment apparatus and temperature control method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM FORMING METHOD AND HEAT TREATMENT APPARATUS

THERMOCOUPLE STRUCTURE, HEAT TREATMENT APPARATUS, AND METHOD OF MAN...

FILM FORMING METHOD AND FILM FORMING APPARATUS

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND FILM FORMING M...

HEAT TREATMENT APPARATUS AND FILM DEPOSITION METHOD

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

TEMPERATURE MONITORING APPARATUS, HEAT TREATMENT APPARATUS, AND TEM...

HEAT TREATMENT APPARATUS

HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD