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Yasuaki Yokoyama
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Itabashi-ku, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus and exposure method
Patent number
9,513,567
Issue date
Dec 6, 2016
National Institute of Advanced Industrial Science and Technology
Shiro Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Exposure Apparatus and Exposure Method
Publication number
20140320840
Publication date
Oct 30, 2014
National Institute of Advanced Industrial Science and Technology
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS