Yasuaki Yokoyama

Person

  • Itabashi-ku, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Exposure apparatus and exposure method

    • Patent number 9,513,567
    • Issue date Dec 6, 2016
    • National Institute of Advanced Industrial Science and Technology
    • Shiro Hara
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    Exposure Apparatus and Exposure Method

    • Publication number 20140320840
    • Publication date Oct 30, 2014
    • National Institute of Advanced Industrial Science and Technology
    • Shiro Hara
    • H01 - BASIC ELECTRIC ELEMENTS