Yasufumi Koyama

Person

Kamikyo-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus
- Patent number 7,563,323
- Issue date Jul 21, 2009
- Dainippon Screen Mfg. Co. Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for performing photolithography
- Patent number 7,525,650
- Issue date Apr 28, 2009
- Dainippon Screen Mfg., Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,497,912
- Issue date Mar 3, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Yasufumi Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transporting substrate...
- Patent number 7,317,961
- Issue date Jan 8, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,229,240
- Issue date Jun 12, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of transporting and processing substrates in substrate proce...
- Patent number 7,069,099
- Issue date Jun 27, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, operation method thereof and program
- Patent number 6,937,917
- Issue date Aug 30, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kazuya Akiyama
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate treating apparatus
- Patent number 6,837,632
- Issue date Jan 4, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yasufumi Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport method and apparatus
- Patent number 6,253,118
- Issue date Jun 26, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Yasufumi Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for detecting and conveying substrates in cass...
- Patent number 5,906,469
- Issue date May 25, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiji Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conversion device for laser interferometic measuring apparatus
- Patent number 5,184,313
- Issue date Feb 2, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Akira Kuwabara
- G01 - MEASURING TESTING
Information Patent Grant
Method of and apparatus for controlling deflection of optical beams
- Patent number 5,111,332
- Issue date May 5, 1992
- Dainippon Screen Mfg. Co., Ltd.
- Akira Kuwabara
- G02 - OPTICS
Information Patent Grant
Apparatus for expanding and formatting runlength data for multiple...
- Patent number 5,065,445
- Issue date Nov 12, 1991
- Dainippon Screen Mfg. Co., Ltd.
- Akira Kuwabara
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Laser scan recording apparatus using aperture plates to form shifte...
- Patent number 4,896,169
- Issue date Jan 23, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Akira Kuwabara
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and method of transporting substrate...
- Publication number 20060195216
- Publication date Aug 31, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20050061441
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20050061248
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yasufumi Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050061240
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus for performing photolithography
- Publication number 20050061242
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masayoshi Shiga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method of transporting substrate...
- Publication number 20040182318
- Publication date Sep 23, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Hashinoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, operation method thereof and program
- Publication number 20040122545
- Publication date Jun 24, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kazuya Akiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate treating apparatus
- Publication number 20040037677
- Publication date Feb 26, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasufumi Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Yasufumi Koyama

Person

Patents Grantslast 30 patents

Substrate treating apparatus

Substrate processing apparatus for performing photolithography

Substrate processing apparatus

Substrate processing apparatus and method of transporting substrate...

Substrate processing apparatus and substrate processing method

Method of transporting and processing substrates in substrate proce...

Substrate processing apparatus, operation method thereof and program

Substrate treating apparatus

Substrate transport method and apparatus

Apparatus and method for detecting and conveying substrates in cass...

Conversion device for laser interferometic measuring apparatus

Method of and apparatus for controlling deflection of optical beams

Apparatus for expanding and formatting runlength data for multiple...

Laser scan recording apparatus using aperture plates to form shifte...

Patents Applicationslast 30 patents

Substrate processing apparatus and method of transporting substrate...

Substrate treating apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus for performing photolithography

Substrate processing apparatus and method of transporting substrate...

Substrate processing apparatus, operation method thereof and program

Substrate treating apparatus