Yasuharu Iwashita

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device and bonding system
- Patent number 10,424,502
- Issue date Sep 24, 2019
- Tokyo Electron Limited
- Masataka Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveyance apparatus and substrate peeling system
- Patent number 9,679,798
- Issue date Jun 13, 2017
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peeling system
- Patent number 9,595,462
- Issue date Mar 14, 2017
- Tokyo Electron Limited
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus and substrate holding method
- Patent number 9,343,349
- Issue date May 17, 2016
- Tokyo Electron Limited
- Yasuharu Iwashita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Peeling system, peeling method, and computer storage medium
- Patent number 9,165,758
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Naoto Yoshitaka
- B32 - LAYERED PRODUCTS
Information Patent Grant
Substrate inverting device, substrate inverting method, and peeling...
- Patent number 8,997,822
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joint system, joint method, program and computer storage medium
- Patent number 8,795,463
- Issue date Aug 5, 2014
- Tokyo Electron Limited
- Takahiro Nishibayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge exposure apparatus, coating and developing apparatus, and edge...
- Patent number 7,573,054
- Issue date Aug 11, 2009
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM
- Publication number 20180019153
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Masataka MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEELING SYSTEM
- Publication number 20150136331
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Takeshi Tamura
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE CONVEYANCE APPARATUS AND SUBSTRATE PEELING SYSTEM
- Publication number 20140234033
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...
- Publication number 20130292062
- Publication date Nov 7, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM
- Publication number 20130280825
- Publication date Oct 24, 2013
- TOKYO ELECTRON LIMITED
- Naoto Yoshitaka
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD
- Publication number 20130264780
- Publication date Oct 10, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
JOINT SYSTEM, JOINT METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM
- Publication number 20120318432
- Publication date Dec 20, 2012
- TOKYO ELECTRON LIMITED
- Takahiro Nishibayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Edge exposure apparatus, coating and developing apparatus, and edge...
- Publication number 20060250594
- Publication date Nov 9, 2006
- TOKYO ELECTRON LIMITED
- Yasuharu Iwashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating film forming apparatus and coating film forming method
- Publication number 20020053321
- Publication date May 9, 2002
- TOKYO ELECTRON LIMITED
- Hiroshi Tomita
- H01 - BASIC ELECTRIC ELEMENTS

Yasuharu Iwashita

Person

Patents Grantslast 30 patents

Substrate transfer device and bonding system

Substrate conveyance apparatus and substrate peeling system

Peeling system

Substrate holding apparatus and substrate holding method

Peeling system, peeling method, and computer storage medium

Substrate inverting device, substrate inverting method, and peeling...

Joint system, joint method, program and computer storage medium

Edge exposure apparatus, coating and developing apparatus, and edge...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM

PEELING SYSTEM

SUBSTRATE CONVEYANCE APPARATUS AND SUBSTRATE PEELING SYSTEM

SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...

PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD

JOINT SYSTEM, JOINT METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM

Edge exposure apparatus, coating and developing apparatus, and edge...

Coating film forming apparatus and coating film forming method