Yasuharu Ohkawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing system, polishing method, polishing pad, and method of fo...
- Patent number 6,722,962
- Issue date Apr 20, 2004
- Sony Corporation
- Shuzo Sato
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system, polishing method, polishing pad, and method of fo...
- Patent number 6,520,835
- Issue date Feb 18, 2003
- Sony Corporation
- Shuzo Sato
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system and method with polishing pad pressure adjustment
- Patent number 6,139,400
- Issue date Oct 31, 2000
- Sony Corporation
- Shuzo Sato
- B24 - GRINDING POLISHING