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Yasuharu Sato
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Kanagawa, JP
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last 30 patents
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Patent Grant
Lithography process window analyzing method and analyzing program
Patent number
8,154,710
Issue date
Apr 10, 2012
Kabushiki Kaisha Toshiba
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
LITHOGRAPHY PROCESS WINDOW ANALYZING METHOD AND ANALYZING PROGRAM
Publication number
20090244512
Publication date
Oct 1, 2009
Shoji Mimotogi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY