Yasuhide Machida

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure data preparation method and exposure method
- Patent number 7,977,018
- Issue date Jul 12, 2011
- Fujitsu Semiconductor Limited
- Kozo Ogino
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure method and charged particle beam exp...
- Patent number 6,060,717
- Issue date May 9, 2000
- Fujitsu Limited
- Yasuo Manabe
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE DATA PREPARATION METHOD AND EXPOSURE METHOD
- Publication number 20090176168
- Publication date Jul 9, 2009
- Fujitsu Microelectronics Limited
- Kozo OGINO
- B82 - NANO-TECHNOLOGY