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Yasuhide Nakai
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Hyogo, JP
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last 30 patents
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Patent Grant
Shape measurement apparatus and shape measurement method
Patent number
8,310,536
Issue date
Nov 13, 2012
Kobelco Research Institute, Inc.
Masaru Akamatsu
G01 - MEASURING TESTING
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Patent Grant
Shape measuring device
Patent number
8,228,509
Issue date
Jul 24, 2012
Kobelco Research Institute, Inc.
Masaru Akamatsu
G01 - MEASURING TESTING
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Patent Grant
Method and apparatus for evaluating semiconductor wafers by irradia...
Patent number
5,430,386
Issue date
Jul 4, 1995
Leo Corporation
Michel Morin
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
SHAPE MEASURING DEVICE
Publication number
20100302551
Publication date
Dec 2, 2010
Masaru Akamatsu
G01 - MEASURING TESTING
Information
Patent Application
SHAPE MEASUREMENT APPARATUS AND SHAPE MEASUREMENT METHOD
Publication number
20100134615
Publication date
Jun 3, 2010
Masaru Akamatsu
G01 - MEASURING TESTING