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Pattern test apparatus
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Patent number 4,962,541
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Issue date Oct 9, 1990
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Hitachi, Ltd.
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Hideaki Doi
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G06 - COMPUTING CALCULATING COUNTING
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Pattern inspection system
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Patent number 4,908,871
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Issue date Mar 13, 1990
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Hitachi, Ltd.
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Yasuhiko Hara
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G06 - COMPUTING CALCULATING COUNTING
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Component alignment method
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Patent number 4,672,209
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Issue date Jun 9, 1987
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Hitachi, Ltd.
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Koichi Karasaki
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Pattern detection system
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Patent number 4,508,453
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Issue date Apr 2, 1985
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Hitachi, Ltd.
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Yasuhiko Hara
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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