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Yasuhiko Kimura
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
8,772,741
Issue date
Jul 8, 2014
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Ion beam irradiation system and ion beam irradiation method
Patent number
8,735,855
Issue date
May 27, 2014
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20120252194
Publication date
Oct 4, 2012
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM IRRADIATION SYSTEM AND ION BEAM IRRADIATION METHOD
Publication number
20110297842
Publication date
Dec 8, 2011
SEN Corporation
Shiro NINOMIYA
H01 - BASIC ELECTRIC ELEMENTS