Yasuhiko Kojima

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and abnormality detection method
- Patent number 12,170,217
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Hiroaki Chihaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 11,551,918
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Kenichi Imakita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device and deposition method
- Patent number 10,309,005
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-target sputter deposition with controlled phase difference bet...
- Patent number 9,567,667
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Shinji Furukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and storage medium
- Patent number 8,900,991
- Issue date Dec 2, 2014
- Tokyo Electron Limited
- Shuji Azumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming film, film forming apparatus and storage medium
- Patent number 8,721,846
- Issue date May 13, 2014
- Tokyo Electron Limited
- Naoki Yoshii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Cu film and storage medium
- Patent number 8,697,572
- Issue date Apr 15, 2014
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper film deposition method
- Patent number 8,211,500
- Issue date Jul 3, 2012
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method using valve metal and nit...
- Patent number 8,207,061
- Issue date Jun 26, 2012
- Tokyo Electron Limited
- Yasuhiko Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, semiconductor device man...
- Patent number 8,133,811
- Issue date Mar 13, 2012
- Tokyo Electrcn Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus and storage medium
- Patent number 8,129,271
- Issue date Mar 6, 2012
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing unit, method of detecting end point of cleanin...
- Patent number 8,075,698
- Issue date Dec 13, 2011
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, semiconductor device manufacturing method, sem...
- Patent number 7,846,839
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer and processor
- Patent number 7,827,932
- Issue date Nov 9, 2010
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas switching mechanism for plasma processing apparatus
- Patent number 7,717,061
- Issue date May 18, 2010
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment method and film forming method, film forming ap...
- Patent number 7,699,945
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Naoki Yoshii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing system having a vaporizer which efficie...
- Patent number 7,332,040
- Issue date Feb 19, 2008
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas phase growth system, method of operating the system, and vapori...
- Patent number 7,323,220
- Issue date Jan 29, 2008
- Tokyo Electron Ltd.
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method of treatment equipment and treatment equipment
- Patent number 7,172,657
- Issue date Feb 6, 2007
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat-treating apparatus and heat-treating method
- Patent number 6,991,684
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivery of precursor vapor from low vapor...
- Patent number 6,548,112
- Issue date Apr 15, 2003
- Tokyo Electron Limited
- Joseph T. Hillman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240021415
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
- Publication number 20240021423
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20220285197
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD
- Publication number 20220285182
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Hiroaki CHIHAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20200381226
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Kenichi IMAKITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE AND DEPOSITION METHOD
- Publication number 20160251746
- Publication date Sep 1, 2016
- Tokyo Electron Limited
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-TARGET SPUTTER DEPOSITION WITH CONTROLLED PHASE DIFFERENCE BET...
- Publication number 20150075971
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Shinji FURUKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20120220121
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING METAL THIN FILM, SEMICONDUCTOR DEVICE AND MANUFA...
- Publication number 20120211890
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20120171365
- Publication date Jul 5, 2012
- TOKYO ELECTRON LIMITED
- Shuji Azumo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND STORAGE MEDIUM
- Publication number 20120164328
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CU FILM, AND STORAGE MEDIUM
- Publication number 20120064247
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Kenji Hiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CU FILM AND STORAGE MEDIUM
- Publication number 20120064248
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING Cu FILM AND STORAGE MEDIUM
- Publication number 20120040085
- Publication date Feb 16, 2012
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CU FILM AND STORAGE MEDIUM
- Publication number 20120028462
- Publication date Feb 2, 2012
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND STORAGE MEDIUM
- Publication number 20110174630
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20100099254
- Publication date Apr 22, 2010
- Tokyo Electron Limited
- Masaki Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...
- Publication number 20100015799
- Publication date Jan 21, 2010
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...
- Publication number 20090321936
- Publication date Dec 31, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...
- Publication number 20090214758
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi KANNAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM
- Publication number 20090181538
- Publication date Jul 16, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20090165720
- Publication date Jul 2, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Film, Film Forming Apparatus and Storage Medium
- Publication number 20090145744
- Publication date Jun 11, 2009
- Tokyo Electron Limited
- Naoki Yoshii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEM...
- Publication number 20090032950
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
- Publication number 20090029047
- Publication date Jan 29, 2009
- Tokyo Electron Limited
- Naoki Yoshii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer and Processor
- Publication number 20090000740
- Publication date Jan 1, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...
- Publication number 20080241385
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Yasuhiro Oshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layered Thin Film Structure, Layered Thin Film Forming Method, Film...
- Publication number 20080070017
- Publication date Mar 20, 2008
- Naoki Yoshii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD AND FILM FORMING METHOD, FILM FORMING AP...
- Publication number 20080020934
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Naoki YOSHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Copper film deposition method
- Publication number 20070197398
- Publication date Aug 23, 2007
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasuhiko Kojima

Person

Patents Grantslast 30 patents

Substrate processing apparatus and abnormality detection method

Film forming apparatus

Deposition device and deposition method

Dual-target sputter deposition with controlled phase difference bet...

Film forming method and storage medium

Method of forming film, film forming apparatus and storage medium

Method for forming Cu film and storage medium

Copper film deposition method

Semiconductor device manufacturing method using valve metal and nit...

Semiconductor device manufacturing method, semiconductor device man...

Film forming method, film forming apparatus and storage medium

Substrate processing unit, method of detecting end point of cleanin...

Film forming method, semiconductor device manufacturing method, sem...

Vaporizer and processor

Gas switching mechanism for plasma processing apparatus

Substrate treatment method and film forming method, film forming ap...

Semiconductor manufacturing system having a vaporizer which efficie...

Gas phase growth system, method of operating the system, and vapori...

Cleaning method of treatment equipment and treatment equipment

Heat-treating apparatus and heat-treating method

Apparatus and method for delivery of precursor vapor from low vapor...

Patents Applicationslast 30 patents

FILM FORMING APPARATUS

FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...

SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD

SUBSTRATE PROCESSING APPARATUS AND ABNORMALITY DETECTION METHOD

FILM FORMING APPARATUS

DEPOSITION DEVICE AND DEPOSITION METHOD

DUAL-TARGET SPUTTER DEPOSITION WITH CONTROLLED PHASE DIFFERENCE BET...

FILM FORMING METHOD AND STORAGE MEDIUM

METHOD FOR FORMING METAL THIN FILM, SEMICONDUCTOR DEVICE AND MANUFA...

FILM FORMING APPARATUS, FILM FORMING METHOD AND STORAGE MEDIUM

FILM FORMATION METHOD AND STORAGE MEDIUM

METHOD FOR FORMING CU FILM, AND STORAGE MEDIUM

METHOD FOR FORMING CU FILM AND STORAGE MEDIUM

METHOD FOR FORMING Cu FILM AND STORAGE MEDIUM

METHOD FOR FORMING CU FILM AND STORAGE MEDIUM

FILM FORMATION METHOD AND STORAGE MEDIUM

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE MANUFAC...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...

A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...

FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM

SUBSTRATE TREATING APPARATUS

Method of Forming Film, Film Forming Apparatus and Storage Medium

FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEM...

FILM-FORMING APPARATUS AND FILM-FORMING METHOD

Vaporizer and Processor

Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...

Layered Thin Film Structure, Layered Thin Film Forming Method, Film...

SUBSTRATE TREATMENT METHOD AND FILM FORMING METHOD, FILM FORMING AP...

Copper film deposition method