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Yasuhiko Matsunaga
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Sakura-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electron flood apparatus and ion implantation system
Patent number
7,126,138
Issue date
Oct 24, 2006
Applied Materials, Inc.
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method, SOI wafer manufacturing method and ion imp...
Patent number
7,064,049
Issue date
Jun 20, 2006
Applied Materials, Inv.
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for ion implanting
Patent number
6,617,594
Issue date
Sep 9, 2003
Applied Materials, Inc.
Yoshihiko Fujiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of ion implantation
Patent number
6,583,018
Issue date
Jun 24, 2003
Applied Materials, Inc.
Yasuhiko Matsunaga
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electron flood apparatus and ion implantation system
Publication number
20050116156
Publication date
Jun 2, 2005
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implantation method, SOI wafer manufacturing method and ion imp...
Publication number
20040038505
Publication date
Feb 26, 2004
Hiroyuki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implantation apparatus and insulating bushing therefor
Publication number
20020158213
Publication date
Oct 31, 2002
Yasuhiko Matsunaga
H01 - BASIC ELECTRIC ELEMENTS